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Problems with Measuring Beam Size of a Focused Ion Beam System by Means of the Rise-Distance
Problems with Measuring Beam Size of a Focused Ion Beam System by Means of the Rise-Distance
2010
Laurent Roussel
J Orloff
Keywords:
Ion beam
Focused ion beam
Laser beam quality
Analytical chemistry
Beam (structure)
Materials science
Optics
beam size
Correction
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