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Morphological and structural study of integrated circuits using XTEM and HREM
Morphological and structural study of integrated circuits using XTEM and HREM
1990
L.M. Bharadwaj
L.M. Gantcheva
Stephan Simov
Gérard Balossier
J. Faure
P. Bonhomme
Keywords:
Materials science
Integrated circuit
Optoelectronics
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