λ-compact ITO Plasmonic Mach-Zehnder Modulator on Si

Rubab Amin,Rishi Maiti,Yaliang Gui,Can Suer,Mario Miscuglio,Elham Heidari,Ray T. Chen,Hamed Dalir,Volker J. Sorger

λ-compact ITO Plasmonic Mach-Zehnder Modulator on Si

2020

Rubab Amin
Rishi Maiti
Yaliang Gui
Can Suer
Mario Miscuglio
Elham Heidari
Ray T. Chen
Hamed Dalir
Volker J. Sorger

We demonstrate an integrated wavelength-compact plasmonic ITO-based Mach-Zehnder electro-optic modulator on Si platform, within a miniscule phase-shifter length of 2.5 µm, featuring a half-wave voltage and active device length product of VπL = 95 V·µm.

Keywords:

Optoelectronics
Modulation
Electro-optic modulator
Plasmon
Voltage
Materials science
Thin film
active devices

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