Old Web
English
Sign In
Acemap
>
Paper
>
Production of Low Electron-Temperature and High Density Plasma by Using a Grid-Cage Electrode for RF Discharge
Production of Low Electron-Temperature and High Density Plasma by Using a Grid-Cage Electrode for RF Discharge
2016
Kohgi Kato
Takuma Gohda
Satoru Iizuka
Keywords:
Electron temperature
Analytical chemistry
Grid
Plasma
Electrode
Materials science
Cage
Optoelectronics
rf discharge
high density
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]