Design a T-Shape Cantilever Beam Using by Scilab and COMSOL

Cantilever plays a major part in the detection of gases, upgrading existing sensors with fabricating technologies. The paper describes displacement of piezoelectric cantilever sensor of a T-shaped for MEMS technology for chemical/biodetection. The microelectromechanical systems (MEMS) sensors give compactness and robustness as well as enhanced lifespan. Thus, the concept of the microcantilever beam layered with piezoelectric materials is to monitor and analyze the density of gases. Various properties for cantilever beam have been mentioned in this paper. Configurations of cantilever beams are simulated and designed with COMSOL Multiphysics and theoretical simulations are made in Scilab. The design was built and computed to determine the corresponding displacement for the pressure being applied. Analysis is repeated by changing its structure with same measurements. Deflections are measured and tabulated to choose the optimal configuration for good sensitivity of a gas sensor.