Modeling and experimental studies of capacitive pressure sensors with microstructured dielectric layers

Electronic skin (e-skin) has shown great application prospects in many fields due to its multiple advantages. Previous studies have illustrated that the structure with a dielectric layer sandwiched between two electrodes had good pressure-sensing abilities, and microstructures in the dielectric layer could improve the sensitivity. In this paper, we proposed mechanical models of e-skin sensing unit with different microstructures (flat, trapezoidal, half-cylinder, and pyramids) in the dielectric layer. Then, we performed finite element method simulations and experiments to validate the model. Finally, we demonstrated its application as the pressure-sensing unit for human hands, showing its great potentials in sensors of artificial prosthesis or soft robots in the future.