Efficient Photochemical Conversion of N2O into N2 and O2 by 193-nm-ArF-excimer Laser in N2 or Air at Atmospheric Pressure

N 2 O removal by using 193-nm-ArF-excimer laser has been studied at a low N 2 O concentration of 100 ppm in N 2 or air. N 2 O was decomposed into N 2 and O 2 without any NOx emission at atmospheric pressure. After lOmin laser irradiation, the N 2 O conversion was 95% in N 2 , while it was 100% in air. The decomposition mechanism of N 2 O in N 2 and air was discussed from a kinetic model.