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Fabrication and characterization of tunneling current of anodic bonded dry-etched MEMS tunneling accelerometer
Fabrication and characterization of tunneling current of anodic bonded dry-etched MEMS tunneling accelerometer
2004
Haifeng Dong
Yilong Hao
Yubin Jia
Guizhen Yan
Ying Wang
Ting Li
Keywords:
Electronic engineering
Anode
Engineering
Microelectromechanical systems
Accelerometer
Fabrication
Optoelectronics
Quantum tunnelling
tunneling current
Correction
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