Mechanism of Na-doped p-type ZnO films: Suppressing Na interstitials by codoping with H and Na of appropriate concentrations

Hydrogen is codoped with sodium into ZnO films. X-ray photoelectron spectroscopy and secondary ion mass spectroscopy indicate that the Na concentration decreases as the substrate temperature increases. Hall-effect tests reveal a transition from n-type to p-type conduction when the growth temperature increases, which is explained by the suppression of Na interstitials by codoping with H and Na of appropriate concentrations. An insulating intended Na–H codoped sample shows reduced resistivity and p-type conductivity after annealing at 550 °C, which may be due to dissociation of NaZn–H complexes. The realization of p-type ZnO by Na–H codoping may explain the discrepancies in behavior of Na in ZnO and suggests the potential of Na–H codoping method [E.-C. Lee and K. J. Chang, Phys. Rev. B 70, 115210 (2004)].