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Group-II Hafnate, Zirconate, and Tantalate High-k Dielectrics for MIM Applications: The Defect Issue
Group-II Hafnate, Zirconate, and Tantalate High-k Dielectrics for MIM Applications: The Defect Issue
2009
J. Dąbrowski
P. Dudek
Grzegorz Kozlowski
Grzegorz Lupina
Gunther Lippert
Ronny Schmidt
Christian Walczyk
Christian Wenger
Keywords:
Dielectric
High-κ dielectric
Zirconate
Tantalate
Materials science
Inorganic chemistry
group ii
Optoelectronics
Correction
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