Solution-processed transparent dielectric based on spin-on glass for electronic devices

In this work, the fabrication and characterization of MOS and MIM capacitors using a solution-processed dielectric based on spin-on glass (SOG) solution is presented. The SOG solution is diluted with deionized water (DI) in order to make easier the evaporation of the organic material presented in the SOG. The films are highly transparent in the visible range, which makes feasible they use in transparent electronics. The capacitance-voltage and current-voltage characteristics of the MOS and MIM capacitors demonstrate the application of the solutionprocessed SOG/DI film as dielectric for electronic devices.