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Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharges
Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharges
1998
Y. Yasaka
T. Nozaki
Kazuya Koga
Makoto Ando
T. Yamamoto
Naohisa Goto
Nobuo Ishii
Tamotsu Morimoto
Keywords:
Materials science
Atomic physics
Torr
Plasma
Microwave
large diameter
Correction
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