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SOI Substrate Removal for SEE Characterization and Recent Results.
SOI Substrate Removal for SEE Characterization and Recent Results.
2011
M.R. Shaneyfelt
James R. Schwank
Paul E. Dodd
Jeffrey Stevens
Scot E. Swanson
Scott M. Dalton
Keywords:
Substrate (chemistry)
Materials science
Silicon on insulator
Electronic engineering
Optoelectronics
soi substrate
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