Characterizing deformable mirrors for the MagAO-X instrument

The MagAO-X instrument is an extreme adaptive optics system for high-contrast imaging at visible- and near-infrared wavelengths on the Magellan Clay Telescope. A central component of this system is a 2040-actuator microelectromechanical deformable mirror (DM) from Boston Micromachines Corp. that operates at 3.63 kHz for high-order wavefront control (the tweeter). Two additional DMs from ALPAO perform the low-order (the woofer) and non-common-path science-arm wavefront correction (the NCPC DM). Prior to integration with the instrument, we characterized these devices using a Zygo Verifire Interferometer to measure each DM surface. We present the results of the characterization effort here, demonstrating the ability to drive the tweeter to a flat of 6.9 nm root-mean-square (RMS) surface (and 0.56 nm RMS surface within its control bandwidth), the woofer to 2.2-nm RMS surface, and the NCPC DM to 2.1-nm RMS surface over the MagAO-X beam footprint on each device. Using focus-diversity phase retrieval on the MagAO-X science cameras to estimate the internal instrument wavefront error, we further show that the integrated DMs correct the instrument WFE to 18.7 nm RMS, which, combined with a 11.7% pupil amplitude RMS, produces a Strehl ratio of 0.94 at Hα.