Narrow size-distributed silicon cluster beam generated using a spatiotemporal confined cluster source

Abstract We have developed a new laser ablation type cluster source named `spatiotemporal confined cluster source' (SCCS), which gives well-defined thermo-dynamical conditions for cluster growth with narrow size dispersion. A laser-induced shock is controlled to produce a definite mixed gas layer of the silicon vapor and helium gas, which is locally confined in a sub millimeter space, and conserved densely for a time of 160 μs. The generated silicon clusters, which are ionized by an ArF excimer laser for mass analysis without dissociation, show narrow size dispersion with characteristically higher abundance of stable Si 23 H x (46%), Si 19 H x (14%), and Si 21 H x (12%) clusters.