Enhanced Lateral Drift Sensors: Concept and Development

We discuss the concept of an enhanced lateral drift (ELAD) sensors for getting an improvement of the position resolution. The ELAD sensors make use of a non-homogeneous electric field resulting from deep implants in the bulk to achieve a lateral drift of a charge cloud. This enables improved charge sharing over the entire pitch. In order to find an optimal sensor design, detailed simulation studies have been conducted using SYNOPSYS TCAD. Two types of simulations have been carried out: simulation of the electric field and charge drift simulations. A multi-layer-production technique, which allows for deep-bulk engineering, is sketched herein.