Laser Scanning Confocal Image Alignment Assists Sub-micron Accuracy Micro-assembly

Abstract The image resolution of the ordinary optical microscope in the assembly system can’t break through the optical diffraction limit, and the accuracy of alignment detection can’t reach the sub-micron level. So we build the micro assembly system based on the principle of confocal image alignment to solve the above problems. In this paper, the basic principle and system of confocal image alignment assembly are studied, and the levelling calibration method of the platform is also studied. After the calibration, the alignment resolution of the micro assembly system based on the principle of confocal image alignment can reach 0.5μm.The confocal image alignment principle is verified by the assembly application experiment of inserting a 125-μm-diameter optical fiber into a 127-μm-diameterglass micro tubule. The confocal image alignment principle and the calibration method can greatly improve the accuracy and efficiency of the micro assembly.