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Reduced carbon contaminant, low-temperature silicon substrate preparation for
Reduced carbon contaminant, low-temperature silicon substrate preparation for
1999
P. J. Taylor
W. A. Jesser
M. Martinka
K. M. Singley
J. H. Dinan
R. T. Lareau
Michael C Wood
William W. Clark
Keywords:
Carbon
Inorganic chemistry
Substrate (chemistry)
Chemistry
Silicon
Correction
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