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特集4 : 研究速報 : Micro Electrical Connectors by Silicon Anisotropic Etching
特集4 : 研究速報 : Micro Electrical Connectors by Silicon Anisotropic Etching
1997
Hiroshi Toshiyoshi
Yoshio Mita
Minoru Ogawa
Hiroyuki Fujita
Keywords:
Etching
Anisotropy
Composite material
Mechanical engineering
Materials science
Silicon
silicon anisotropic etching
Correction
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