The studying of solar cell process by using optoelectronic measurement system

For the optical anti-reflection coating (ARC) and passivation properties, the relationship between parameters of PECVD and solar cell photoelectricity properties is investigated in this work. Solar cell’s photoelectricity properties are studied by using various optoelectronic measurement systems. It is found that minority carrier recombination can be reduced by changing the parameters of PECVD, specially tuning pressure parameter, and the hydrogen content is different as the gas total flow changing if the temperature and pressure no changes. And also the hydrogen content can be calculated by absorption spectrum being tested with optoelectronic measurement system.