Monte Carlo backscattering yield (BY) calculations applying continuous slowing down approximation (CSDA) and experimental data

Abstract The backscattering yield (BY) is an important factor in elastic peak electron spectroscopy. Monte Carlo (MC) algorithm describing the electron elastic and inelastic backscattering from surfaces is presented applying the continuous slowing down approximation, i.e., an assumption that an electron loses energy continuously along the trajectory length. Energy losses calculations were performed using recently published stopping power (SP) functions, calculated from the experimental optical data by Tanuma et al., and the experimental SP functions published elsewhere. In the MC algorithm, calculating the values of BY, the input parameters are the elastic scattering cross sections and the SP function. The MC calculations were performed at selected energies ranging from 200 to 30 000 eV. Ten elemental solids were considered: Al, Si, Cr, Ni, Cu, Ge, Pd, Ag, Pt, and Au. All MC simulations were performed for normal incidence of the beam on a sample and the backscattered electron emission into negative hemisphere. Results of BY calculations were compared to available experimental data taken from Joy database of electron–solid interactions. In most cases, the results deviate less than 10% from the available experimental data.