High-Entropy Superhard Coatings Based on the AlTiCrVNbMo Alloy

Coatings that consisted of the high-entropy AlTiCrVNbMo alloy were obtained by ion sputtering in plasma of compressed vacuum-arc discharge. The hardness of this metal coating is at the level of 18 GPa due to the presence of nanostructures along with cluster structures. Coatings made of this alloy in a nitrogen atmosphere are solid solutions based on an FCC lattice; the hardness of these coatings is in the range of 28–44 GPa and the combined elastic modulus is in the range of 255–340 GPa for coatings obtained in different technological modes. The hardness values of the oxide coatings are in the range of 33–35 GPa and the values of the combined elastic modulus are in the range of 280–290 GPa. The friction coefficient of this alloy depends on alloy hardness and ranges from 0.24 to 0.061.