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Control of Leakage Current in Polysilicon TFT's by the Implantation of Boron
Control of Leakage Current in Polysilicon TFT's by the Implantation of Boron
1998
Quinn
Baine
Lee
Mitchell
Armstrong
Gamble
Keywords:
Boron
Annealing (metallurgy)
Optoelectronics
Amorphous silicon
Fabrication
Materials science
Thin-film transistor
Correction
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