Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes

High-performance flexible pressure sensors are highly desirable in health monitoring, robotic tactile, and artificial intelligence. Construction of microstructures in dielectrics and electrodes is the dominating approach to improving the performance of capacitive pressure sensors. Herein, we have demonstrated a novel three-dimensional microconformal graphene electrode for ultrasensitive and tunable flexible capacitive pressure sensors. Because the fabrication process is controllable, the morphologies of the graphene that is perfectly conformal with the electrode are controllable consequently. Multiscale morphologies ranging from a few nanometers to hundreds of nanometers, even to tens of micrometers, have been systematically investigated, and the high-performance capacitive pressure sensor with high sensitivity (3.19 kPa–1), fast response (30 ms), ultralow detection limit (1 mg), tunable-sensitivity, high flexibility, and high stability was obtained. Furthermore, an ultrasensitivity of 7.68 kPa–1 was succ...