Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode

Abstract Carbon-sulfur-gold (C-S-Au) composite thin films were formed by a co-operation process of plasma CVD and sputtering, using methane, SF 6 and Ar mixture gas, and gold plate on the discharge electrode. The content of Au atoms in the film was smaller than 2 at.%. The refractive indexes were measured to be 1.6, 2.4 and 3.7 for C, C–S (80:20 at.% ratio) and C–S–Au (81.1:18.8:0.1 at.% ratio), respectively. The electronic polarizabilities of C, S and Au are discussed, using the values of refractive index.