고정밀 3축 UVW 스테이지의 기구학 및 정확도 비교분석

UVW Stage is widely used in manufacturing processes of PCB, LCD, OLED, and semiconductor industries. The precision of UVW Stage is closely associated with the quality of products. Two approaches for kinematics of UVW Stage are proposed for comparative analysis. Program of proposed kinematics algorithm is developed for motion control and applied to UVW Stage driving. The position of the stage for each algorithm is sequentially measured by laser interferometer. Both virtual stage and real stage are used for accuracy analysis. The performance of each algorithm is evaluated based on this accuracy analysis.