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Atomic-Scale Simulations of Sputter Deposition: Influence of Energetic Particles on Film Morphology
Atomic-Scale Simulations of Sputter Deposition: Influence of Energetic Particles on Film Morphology
2000
Jacques dalla Torre
G. H. Gilmer
David L. Windt
Peter L. O’Sullivan
Frieder H. Baumann
Mehdi Djafari-Rouhani
Keywords:
Materials science
Sputter deposition
Atomic units
Morphology (linguistics)
Chemical physics
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