Recent Developments in Silicon-based MEMS Photonic Systems

Wilfried Noell,N. F. de Rooij,Marc Epitaux,Ralf Hauffe,T. Overstolz,Yves Petremand,Severin Waldis,R. Stanley,Frederic Zamkotsian,M. Zickar

Recent Developments in Silicon-based MEMS Photonic Systems

2007

Wilfried Noell
N. F. de Rooij
Marc Epitaux
Ralf Hauffe
T. Overstolz
Yves Petremand
Severin Waldis
R. Stanley
Frederic Zamkotsian
M. Zickar

Silicon-based photonic MEMS modulate light by displacing microoptical elements such as micromirrors and microlenses. Recent development focus on fiber-laser couplers, multi-object spectrometers, and tunable cavities.

Keywords:

Optoelectronics
Fiber laser
Photonics
Microelectromechanical systems
Optics
Silicon
Physics
Spectrometer
silicon based

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