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Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams
2004
Struts
Matvienko
Ryabchikov
Petrov
Shlapakovski
Keywords:
Deposition (chemistry)
Power (physics)
Adhesive
Ion
Thin film
Silicon
Composite material
Materials science
Correction
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