Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology

Abstract Micro- and nano-fabrication researches of various perfluorinated polymers carried out recently both by synchrotron radiation (SR) direct photo-etching and by focused ion beam (FIB) direct mask less etching are reviewed. After the irradiation, the etching depth of the fabricated samples has been evaluated by optical microscope and scanning electron microscope. SR-induced surface modifications were studied by solid-state 19 F nuclear magnetic resonance (NMR) spectroscopy and differential scanning calorimeter (DSC) analysis. It was found that the etching rate of FEP at 140 °C was highest and that of PTFE and PFA at 140 °C was lower in the SR etching. It was found that crosslinking reactions were induced by SR irradiation at the region within about 50 μm from the irradiated surface. FIB mask less etching showed very attractive features for nano-scale fabrications. The aspect ratio for crosslinked PTFE (RX-PTFE) reached 390. In addition, the nano-scale controlled structures with high aspect and quality of RX-PTFE were obtained without solid debris.