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Properties of (Ti, Al)N films prepared by ion beam assisted deposition
Properties of (Ti, Al)N films prepared by ion beam assisted deposition
1995
Tsuneo Suzuki
Yuichi Setsuhara
Yukio Makino
Shoji Miyake
Takao Sakata
Hirotaro Mori
suzuki tuneo
fusi hara yuuiti
kan no yukio
miyake masasi
sakata takao
mori hirotarou
Keywords:
Crystal structure
Ion beam-assisted deposition
Wurtzite crystal structure
Materials science
Analytical chemistry
Crystal growth
Microstructure
X-ray crystallography
Scanning electron microscope
Selected area diffraction
Correction
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