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Aging in Ferroelectric Si‐Doped Hafnium Oxide Thin Films
Aging in Ferroelectric Si‐Doped Hafnium Oxide Thin Films
2021
C. Mart
Nico-Dominik Kohlenbach
K. Kühnel
Sophia Eßlinger
Malte Czernohorsky
T. Ali
Wenke Weinreich
Lukas M. Eng
Keywords:
Ferroelectricity
Thin film
si doped
Pyroelectricity
Atomic layer deposition
Materials science
Hafnium oxide
Optoelectronics
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