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Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler
Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler
2021
Q Qiao
Yazici
B. Dong
X. Liu
Chengkuo Lee
G. Zhou
Keywords:
Microelectromechanical systems
Photonics
Materials science
mid infrared
Waveguide (acoustics)
Silicon
Optoelectronics
Correction
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