Fluid simulation of a pulse-modulated, inductively coupled plasma discharge with radio frequency bias

Abstract The plasma characteristics of pulse-modulated, radio frequency (RF) power in an inductively coupled plasma discharge were investigated. A two-dimensional axisymmetric structure was simulated based on the fluid model. In addition, the energy and mobility of neutral species were considered. When the power was switched to ON from OFF, the electron density and electron temperature changed instantaneously. When the power was OFF, we analyzed the profiles of the electron density and electron temperature over time. Moreover, the ion energy distribution function was investigated using several RF bias conditions.