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Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro‐Electromechanical Systems (MEMS)
Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro‐Electromechanical Systems (MEMS)
2018
Rachael K. Jayne
Thomas Stark
Jeremy B. Reeves
David J. Bishop
Alice E. White
Keywords:
Microelectromechanical systems
Control engineering
Materials science
Mechanical engineering
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