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Investigation of the chemical state of ultrathin Hf-Al-O films during high temperature annealing [rapid communication]
Investigation of the chemical state of ultrathin Hf-Al-O films during high temperature annealing [rapid communication]
2004
Mu Hee Cho
Hyo Sik Chang
Yeol Je Cho
Dae Won Moon
Kyung Ha Min
Rowena Sinclair
Seung Kang
D-H Ko
J.H. Lee
Jun Gu
N.I. Lee
Keywords:
Inorganic chemistry
Chemistry
Annealing (metallurgy)
X-ray photoelectron spectroscopy
Chemical state
Binding energy
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