Transformation of copper structure on exposure to a nonequilibrium low-temperature air plasma

The change in the structure of M1 copper on exposure to a nonequilibrium low-temperature plasma produced by a high-frequency capacitive discharge in air at a pressure of about 1 Torr was investigated. The influence of the duration of plasma action on the structure and mechanical properties of copper has been studied. The increase in the dispersity of copper and in the homogeneity of its structure under the action of plasma has been established. It is shown that transformation of the copper structure is accompanied by the formation of static distortions of its crystal lattice at a level of about 0.007∙10–10 m.