Schottky junction plane explosion switch used for exploding foil initiator and preparation method thereof

2013 
The invention discloses a schottky junction plane explosion switch used for exploding foil initiator and a preparation method of the schottky junction plane explosion switch. The switch comprises a silica-based substrate, a SiO2 insulation layer on the silica-based substrate, a metallic copper layer and a schottky junction bridge zone layer. Compared with the prior art, the schottky junction plane explosion switch has the advantages that the switch is small in size and low in manufacturing cost, and by the utilization of a MEMS (micro electro mechanical system) technology, the switch is easy to integrate with a exploding foil initiation system to achieve microminiaturization of the exploding foil initiation system; the switch containing schottky junctions is low in trigger voltage and capable of resisting stray current and has certain safety, and the effect of controllable excitation energy is achieved through control over the number of the schottky junctions; the switch is a one-time effect device and meets the characteristics of one-time effect of the exploding foil initiation system, and in comparison with a traditional vacuum trigger switch, the usage rate of the switch is improved.
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