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Precision measurement of gap width of slot die coater by using a micro-probe
Precision measurement of gap width of slot die coater by using a micro-probe
2016
So Ito
Yuan-Liu Chen
Hirotaka Kikuchi
Yuki Shimizu
Wei Gao
Kazuhiko Takahashi
Toshihiko Kanayama
Kunmei Arakawa
Atsushi Hayashi
Keywords:
gap width
Optics
Materials science
Correction
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