Etching Kinetics of Si(111) Surface by Selenium Molecular Beam
2020
Using in situ ultrahigh vacuum reflection electron microscopy, three modes of the etching kinetics of the Si(111) surface with a selenium molecular beam are revealed. In the low temperature region (
$$\lesssim$$
650
$${}^{\circ}$$
C depending on the Se deposition rate), the etching kinetics is limited by the energy of formation and desorption of SiSe
$${}_{2}$$
molecules and the surface is completely covered by an impurity-induced silicon selenide phase ‘‘1 $$\times$$
1’’-Se. In the temperature range $${\sim}700{-}1100^{\circ}$$
C the etching rate is limited by the amount of Se deposition flow and does not depend on the temperature, surface structure, and etching mechanism (step-layer or two dimensional-island). At high temperatures (
$${\gtrsim}1150^{\circ}$$
C), the sublimation of Si atoms begins to make the main contribution to the silicon flux from the surface. A theoretical model describing the temperature and kinetics of transitions between etching modes is formulated.
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