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Evaluation of gas phase and wall surface chemical reactions in CF 4 and C 4 F 8 plasmas
Evaluation of gas phase and wall surface chemical reactions in CF 4 and C 4 F 8 plasmas
2018
Xi Feng Wang
Yuan-Hong Song
You-Nian Wang
Igor Kaganovich
Keywords:
Analytical chemistry
C-4
gas phase
Materials science
Plasma
surface chemical
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