An evaluation of the accuracy and precision of X-ray microanalysis techniques using BCR-126A glass reference material

Abstract The precision and accuracy of four different X-ray analytical techniques at the micrometre level, PIXE–RBS, PIXE–PIXE, μ-SRXRF and WDS, have been investigated and compared. A range of different reference materials was considered for this purpose, and the glass BCR 126A was selected for the inter-comparison study, due to its homogeneity, chemical stability and elemental composition. The experimental protocols were tailored to employ the standard, optimal measurement conditions for each technique and material, but still retaining comparable measurement parameters between the different methods. The results show that the different techniques can complement each other without compromising in accuracy, and that they agree with each other to better than 5%.