Monolithic 3D 6T-SRAM Based on Newly Designed Gate and Source/Drain Bottom Contact Schemes

For the first time, we suggested that the monolithic 3D (M3D) static random access memory (SRAM) with gate and S/D bottom contact (GBC and SDBC) schemes (SRAMSDGBC) and analyzed they could significantly improve the power, performance, and area (PPA) compared to the conventional M3D SRAM (SRAM3D). SRAM3D could not directly connect the top-tier device and the bottom-tier metal line. Thus two tiers had to be connected by bypassing the metal line. As a result, SRAM3D wasted the area to place the monolithic interlayer via and did not get 50 % area scaling. However, gate and S/D bottom contact schemes, GBC and SDBC, could solve these problems. Although these methods required additional process steps, they brought significant advantages in interconnect RC and PPA. Based on a 26 nm width nanosheet transistor, SRAM3D showed a 30 % area reduction compared to 2D SRAM (SRAM2D), whereas SRAMSDGBC showed a 50 % area reduction. In the ideal (worst) case which ignoring (considering) the array resistance, the read and write access time of SRAMSDGBC were improved 7.7 % (19 %) and 8.3 % (33 %) than SRAM3D, and the write dynamic power was improved by 5.9 % (5 %). Especially, SRAMSDGBC showed improved PPA in the worst case compared to SRAM2D_Cu, which had relatively small interconnect resistivity. Namely, GBC and SDBC schemes are essential to enhance the PPA of M3D cells and will be a promising scheme in M3D SRAM and other logic cells.