High density, sub 10 m Ohm R/sub dson/ 100 volt N-channel FETs for automotive applications

Presented in this paper are the results of high-density trench designs in producing extremely low R/sub dson/ MOSFETs in the 100 VN voltage class. R.A. products of 110 m/spl Omega/.mm/sup 2/ and 125 m/spl Omega/.mm/sup 2/ (depending on design) at 10 V gate are the lowest reported in the industry. The incentive behind this work is to address the rising need of this class of MOSFETs in Automotive applications.