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Acoustic Emission Monitoring System for Hard Polishing of Sapphire Wafer
Acoustic Emission Monitoring System for Hard Polishing of Sapphire Wafer
2019
Chun-Wei Liu
Hong-Chang Chen
Shih-Chieh Lin
Keywords:
Acoustic emission
Wafer
Electronic engineering
Optoelectronics
Polishing
Materials science
Sapphire
monitoring system
sapphire wafer
Correction
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