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Investigation of CVD-Co Silicidation for the Improvement of Contact Resistance
Investigation of CVD-Co Silicidation for the Improvement of Contact Resistance
2004
Hyun-Su Kim
Jong-Ho Yun
Kwang-jin Moon
Woong-Hee Sohn
Seong-hwee Cheong
Sug-Woo Jung
Gil-heyun Choi
Se-Hoon Kim
Nam-Jin Bae
Sung-tae Kim
U In Chung
Joo-Tae Moon
Keywords:
Materials science
Contact resistance
Metallurgy
Correction
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