Pressure sensor micro-nano structure with high stability under high-temperature environment

2013 
The invention provides a pressure sensor micro-nano structure with the high stability under a high-temperature environment. The pressure sensor micro-nano structure comprises a silicon carbide membrane sheet, a reflection membrane, a semi-reflection membrane, a bonding layer, a silicon carbide substrate, a packaging layer and a sapphire optical fiber, wherein the reflection membrane is plated in the middle of the silicon carbide membrane sheet; the semi-reflection membrane is plated at the tail end of the sapphire optical fiber; the bonding layer is located between the silicon carbide membrane sheet and the silicon carbide substrate; and the sapphire optical fiber is connected with the silicon carbide substrate through the packaging layer, and is used for transmitting an optical signal. The detection device disclosed by the invention is simple in structure and strong in anti-interference performance, and pressure detection under the high-temperature environment can be realized.
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