Tandem solar cells

The utility model discloses large area of a-Si: H / poly-Si novel tandem solar cells based on wide spectral absorption range of a glass substrate with a transparent conductive film; the tandem solar cells adopt structural materials with different band gap as absorption layer like a-Si: H and poly-Si to constitute the tandem structure, such as glass / TCO / a-Si: H / poly-Si / AZO / Al. The absorption of the solar spectrum is enhanced, the photoelectric conversion efficiency of the solar cells is greatly increased, and the quality and the performance of the solar cells are improved. The deposition of poly-Si adopts new gas source SiCl4/H2, the high-speed low-temperature deposition is realized, and the technology of single-chamber large-area deposition is utilized, and the continuous film forming of poly-Si and a-Si: H in the same PECVD equipment is realized, and the problem that the preparation methods of the a-Si and poly-Si are incompatible is solved. The technical skill for manufacturing the cell has less energy consumption, and the production cost is low, therefore, the utility model is applied to the large-scale industrial production.