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Study on Fabrication and Evaluation of GaN thin films by RF Magnetron Sputtering
Study on Fabrication and Evaluation of GaN thin films by RF Magnetron Sputtering
2018
Toru Nakajima
Hiroshi Kuroda
Yuuki Sato
Tadashi Ohachi
Shinzo Yoshikado
Kikuro Takemoto
Hiroyuki Uno
Naoto Kimura
Masanori Takasaki
Keywords:
Sputter deposition
Thin film
Gallium nitride
Analytical chemistry
Materials science
radio frequency magnetron sputtering
Fabrication
Optoelectronics
Correction
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