Semiconductor tool monitor by integrating defect signatures and in-line WIP
2011
• Klarity SSA can detect Defect Signature on Tool Monitor and Product Wafers • With SSA, Klarity Defect can effectively monitor near realtime signature related excursions in production line • By Integrating with WIP data, Klarity SSA enables Tool Monitoring • This Logic Fab uses integrated WIP and Klarity SSA to successfully control excursions and identify opportunities for baseline Yield improvement.
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